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this post was submitted on 05 Dec 2023
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Googled a bit but I have no idea how they're generating EUV from a particle accelerator. It supposedly "captures the energy emitted by high-energy particles during acceleration", but again, I have no idea how that would work. Are they just phrasing "and then it was slammed into a target" in a weird way?
Here are a few papers on the subject in chronological order:
Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation (2001) - https://www.sciencedirect.com/science/article/abs/pii/S0168900201008877
Steady-State Microbunching in a Storage Ring for Generating Coherent Radiation (2010) - https://journals.aps.org/prl/abstract/10.1103/PhysRevLett.105.154801
Demonstration of a ring-FEL as an EUV lithography tool (2020) - https://journals.iucr.org/s/issues/2020/04/00/ve5121/index.html
Experimental demonstration of the mechanism of steady-state microbunching (2021) - https://www.nature.com/articles/s41586-021-03203-0
A synchrotron-based kilowatt-level radiation source for EUV lithography (2022) - https://www.nature.com/articles/s41598-022-07323-z
Thank you, will give these a read later!