Huawei actually already has an EUV prototype, and is believed to be currently in the process being tested and undergoing trial ruins. If all goes well, mass production should begin either next year or in 2027. It apparently uses a different approach to ASML's, so there is a bit of risk, but it is theoretically sound and I have confidence that they could figure it out.
they should make free electron lasers (i have asked around, seems synchrotron are not bright enough, but lasers have a couple of start ups and stuff doing feasibility studies already) and or do funny stuff with electrons, but those are even more baby-tech level.
it's impressive if they can scale it, duv requires more and more patterning steps to overcome resolution limits, and fuck up on each one brings pain. (there were some claims when euv was arriving that it was a step like from 30 patterns to 3-5 at same resolution)
I saw someone on reddit claim you can get 0.5x smaller node with 2x multi-patterning steps
probably, i remember numbers floating around 7-5 nm transition of like 25 to 35 patterns change (without euv), so in that area
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