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2045 (by Ikegami Noroshi)
(files.catbox.moe)
Anime characters who are partly, or entirely, technological. Or from works featuring sci-fi/cyberpunk/steampunk settings.
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Oh yes, but there was nine years between it and the first film.
I would simply posit that when it comes to impacting the sci-fi/cyberpunk genre, the first film stood alone for long enough to leave a mark all on its own, before the franchise really became, well, a franchise.
The SAC anime and Arise are also big favourites of mine, I just don't credit them with being seminal sci-fi works, the way the initial manga and movie are.